VMQ / VMMVMQ Compact Series
- Measurement range
- 150 × 120 × 75 to 400 × 300 × 200 mm
- Workpiece capacity
- 5–25 kg
- XY area accuracy by field of view
- E2=(2.0+L/200) to E2=(4.0+L/200) µm
Quick-measure platform for one-button inspection and multiple workpieces in one field of view. Accuracy varies with the selected optics and whether the stage moves.
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